Foundry Furnace TEOS Capacity Improvement Study

In the 20 th century, T Company and UMC dominated the foundry industry in the world. Since the 21 st century, the world semiconductor foundry industry has become more and more competitive. Even Intel and Samsung, the biggest players in semiconductor, have started their foundry business. Foundry is very capital-intensive. Take 8 inch Fab as an example, the capacity of 1,000 pieces/month usually means more than $10,000,000 investment. If someone wants to build up one 12 inch advanced technology Fab, the investment will be at billions of dollars level. In the up period of the semiconductor, capacity constraint is usually the bottleneck that many Fabs can not accept more orders.This paper uses T Company TEOS machine group as the research object to discusss the methods and ways of improving foundry capacity under the guidance of six sigma theory, DMAIC method, and other six sigma tools. Capacity improving is mainly from the two aspects of overall equipment efficiency(OEE) and peak throughput. Step-by-step analyze deeply. Find out the root cause and seek the system solution. Finally the TEOS machine group capacity is improved effectively. This study can provide one good reference for T Company other machine groups and other related enterprises.