| In the semiconductor foundry, the air system is very important. It provides clean air with appropriate ranges of temperature and humidity for the CR(Clean Room) to meet the purification requirements of key equipment. OAC(Over Air Conditioning) works year round, it consumes water, electricity, gas and so on. With the increasing of production plant and equipment, more and more energy is consumed by the air system. Studying on methods of saving energy about the air system is in order to save energy and reduce emission as well as reduce operating costs of company.Air handling is a complex process, because it not only removes particles, but also controls the temperature and humidity of the air. Energy consumption will be adjusted to the condition of outdoor air and amount of indoor air. In the past, studies of energy conservation in air system are mostly about the number of ventilation, heating equipment and resistance of air transport. Nowadays, researches are focused on the efficiency of the air conditioner. However, theoretical study is far more than operating and the case of actual running is lack. Energy between different systems is not linked closely enough.The air system processing in companies is almost the same. This thesis attempts to analyze the operation of OAC, combined with domestic and foreign information and practical working experience, classifies the air handling process, analyses the impact of energy usage and energy loss in air system from three aspects, including wind, filter, temperature and humidity. After that, changing the parameters of the air conditioner and comparing data of energy usage in order to verify the feasibility of methods of saving energy and find optimum operating parameters of air conditioner.Power system is an integral whole. Running of individual systems not only consume a lot of energy, but also waste energy. Specific heat capacity of water is high and it is easy to have energy exchange through the water. Both the air system and chilled water system have many aspects involved in water treatment. They can get complementary of energy through water so that we can find new methods of saving energy. In this study, a more complete rehabilitation program has been made, using psychometric chart, thermodynamics and fluid mechanics principles to make calculations of energy saving. After that, we conduct a feasibility analysis of a specific air system. At last, record operating data before and after innovation of air conditioning, compare the energy usage and verify the effect of upgrade project.In winter, the heat recovery from process cooling water can get 43.7% reduction of steam in the warm-up part of air system. In summer, cost reduction can be made through the electricity price difference between peak and valley. Using refrigerator to cool the water in tanks at night and releasing cold to pre-cooling at daytime, which can reduce 20% amount of chilled water of air system. Gathering condensed water from cooling coil and putting it into the cooling tower can save 170 tons of water every day. Through the transformation of water spray can save 100,000 RMB per year. In this study, the operating costs of air system is reduced significantly through energy saving and the study provides theoretic support and practical reference for further energy saving in the future. |
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