Design And Implementation Of IC Manufacturing Process Change Management System Based On MES

Semiconductor manufacturing is based on the circuit layout that provided by customer, by exposure, etching, polishing, ion implantation, silicon wafer thin film growth process steps.In recent years, with the rapid development of manufacturing industry, the manufacturing process is becoming more and more complicated, in today’s highly competitive market environment, enterprises want to occupy more market share, and it must have higher market competitiveness. With high technology, sophisticated manufacturing process, the high cost of raw materials, short production cycle, and the semiconductor industry information exchange speed characteristic is no exception. Semiconductor manufacturing process complexity and specialization of the production management has become one of the most challenging tasks. Therefore, to have a set of adaptation MES production management software of high availability for changing business needs, scalable, it is particularly important. However, because of the special nature of the semiconductor industry, how to implement MES to improve the competitiveness of the company has become the main problem of semiconductor manufacturing enterprise thinking.At present, before a product run in company, Process Integration Engineer will set up every step’s process information in MES system in advance. At the same time for different steps, different equipment, and different product’s Recipe: in the foundry industry, Recipe refers to the control process of the machine need defined according to different products and different steps of the operation. It is usually a control file that the process engineers are created, this file is the product in MES system detailed process information.This paper first analysis combined with the production of the chip, and its key technology. Technology and continuously updated product, process integration engineer will frequently change process information through MES, change the data frequent errors occur, leading to the scrapping of the products.In order to keep the production system can adapt to the needs of business development, we need to develop a system to a dynamic generative process information into MES system, also can inform the related department to prepare in advance(machine parameters, material), the system should also have the sign function and report function, let the manufacturing Department to which a district system process change frequency clearly find the factory of high and low, prepare for the future, improve the ability of automation.The paper focuses on the industrial IC manufacturing process management and performance improvement of industrial automation. This system automation change promotion, to reduce human errors and potential product scrap has more prevention function. The company was originally a single, non-customized MES product, which can adapt to the business process, realize the function of the customer, to meet the diverse needs of production.