Research And Development Of Key Technologies For Manufacturing Execution Systems In Semiconductor Chip Manufacturing Workshops

With the growing demand for semiconductors in various emerging technologies,the strategic status of semiconductors is becoming more and more important.However,the overall manufacturing level of semiconductor industry of China is relatively backward,and the self-sufficiency rate is only about 10%.Meanwhile,because of the complex and re-entrant characteristics of the semiconductor manufacturing process,the traditional manual scheduling cannot meet the requirements of production.Therefore,using information technology to improve the manufacturing level of semiconductor enterprises in aspects of manufacturing process informatization and production scheduling optimization is an important research direction in today's semiconductor manufacturing field.This paper used the semiconductor pattern forming production system as the research object,studied the manufacturing execution system for semiconductors,and the key technologies of scheduling,in order to improve the manufacturing level of the semiconductor manufacturing enterprises.Firstly,after analyzing the functional requirement of MES,this paper designed the overall plan of MES from the two aspects of architecture and function module.Secondly,this paper used a modeling method of Petri Net based on the combination of hierarchical and object-oriented to model the production system.The re-entrant production system was divided into four subnets,including the system level,the area level,the equipment group level and the equipment level.The manufacturing resources of the system were modeled as sub models based on the resource attributes.On this basis,a heuristic assignment method combining Petri net and Multi-agent system was used to solve the problem of semiconductor scheduling.Based on the analysis of the constraints and multi-objective functions of the semiconductor-scheduling problem,and the design of the organization structure and scheduling mechanism of Multi-agent system,a schedule system model was built on the simulation software named CPN Tools to realize and verify the feasibility and effectiveness of the method.Finally,this paper used the UML unified modeling language to analyze and describe the main functions of the system and the logical relationship between them.Besides,the database of the system was designed and the prototype system was developed by the technology of JavaEE on the programming tool MyEclipse10.