Manufacturing Technology Of Small Power Audio Static Induction Transistor

With the improvement of people’s living standard, hi-fi stereo component system and more upscale home theater are gradually starting to occur. As a result, dozens or even hundreds of watts of audio power are needed in these equipment. Hence, low distortion as well as high efficiency of audio amplifier has become one of the key components of them.The device structure, theory, characteristics and applications of static induction transistor are demonstrated based on related literature both at home and abroad. In addition,on the basis of introducing working principle, I-V characteristics, electron concentration in channel, barrier situation controlled by grid voltage and leakage pressure are simulated by the SGFramework.According to there quirement of electrical parameters of the device influenced by audio equipment manufacturers, this passage respectively illustrate the device size、impurity concentration, diffusion junction depth and substrate materials from the material、structure and technological parameters.After working out with the related parameters according to the original layout, we used L-Edit software to render structure of surface grid, and demonstrate the order of the layout and its working functions in detail.The step by step fabrication process of Low power audio SIT are introduced from the point view of manufacturing. Detailed fabrication process and the purpose are mentioned as well. At last the simulation on a series of fabrication process are presented by the Silvaco. A comprehensive test on the device of its electrical parameters are done, including the breakdown voltage, leakage current, on-state voltage drop, dissipation power, I-V characteristics, transfer and temperature change characteristic, etc. At the same time, test results in terms of structure, process, characteristics of2SK79made by Sony of Japan were compared to our devices.