| The weak microelectronic parameters of integrated circuit test system refer to DC voltageless than1mV and DC current less than1mA. The traceability of these parameters is animportant guarantee for their accuracy and reliability. This paper aims to research and design theweak microelectronics parameters calibration technology of integrated circuit test system,according to the demand of calibrating these parameters and the shortcomings of existingcalibration device.Firstly, the characteristics of weak microelectronic parameters of integrated circuit testsystem is researched. The weak microelectronic parameters is one of the most important ICparameters. These parameters reflect the operating characteristics of the IC. The measurement ofweak microelectronic parameters in integrated circuit test system is an important process forvalue transmission, The weak microelectronic parameters can trace up to higher level standardsuntil the highest ones by calibration for integrated circuit test system.Secondly, in order to solve the deficiencies of existing calibration device, this papersummarizes and draws on the advantages of existing calibration device, and designs a set ofcalibration device independently according to the particularity of the characteristics of weakmicroelectronic parameters. Meanwhile, the project has designed a control and calibrationsoftware based on this calibration device. The calibration software and hardware can improvedevice performance by optimizing and customizing to each other. In addition, this paperresearches the metrology transmission of the calibration device.Finally, The device can achieve on the DC voltage measurement uncertainty of1.0×10~-3－1.0×10~-2between1V－100mV, it also can achieve on the DC current measurementuncertainty of1.0×10~-4－1.0×10~-3between1A－100mA. The device is able to meet therequirements of calibrating the weak microelectronic parameters among the existing integratedcircuit test system. |
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