| In modern science and technology development and industrial production process, the vacuum coating technology plays a very important role, as a result of a new vacuum coating equipment or a new application of technology directly generate huge economic benefits and social effectiveness.Plasma enhanced chemical vapor deposition film coating machine (PECVD) could be applied to develop nanometer functional film, hard film and optical thin-film, the purpose of this paper is to design a distributed control system for the machine. In this paper, it is selected to develop scientific instruments for research and development centers by Shenyang are flat-plate solar equipment for the preparation of the study. According to the research process requirement,it has developed a set of control system on the based of the OPTO 22.The control system includes two-grade control, one is Upper-monitor grade, the other is Lower-control grade. It takes industrial control computer as its main controller, uses configuration software to program, therefore, it is powerful for communication and data process and it is easy to upgrade and adjustment.It discusses hardware structural design in control scene about control grade development. Focused on the company's own programming OPTO 22 products to control the coating machine, the hardware logic circuit becomes simplify through the PLC of the original software program. Loading and unloading control system as the core, combined with servo motor control pulse in the distance to move into and out of control like transport.It focus on designing loading, unloading control system and temperature control system development, focusing on hardware and connectivity, to achieve the following control requirements:(1) First analysis the characteristics of the heating wire temperature, and then determine the control function, and Matlab simulation, determining the expert PID algorithm can inhibit a good amount of overshoot in order to meet the theoretical guide the practice;(2) Temperature control systems alarm handling;(3) To achieve installed, uninstall operation and precise control of process parameters;(4) Saving various data and historical data inquiry. |
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