Simulation Of Wafer Production Line Based On Plant-Simulation And Optimization Research

In this paper,the computer simulation technology is used to model and simulate the actual production line,and the production bottleneck is found through the design of DOE experiment and the improvement plan is put forward;Combined with genetic algorithm,the mixed-flow order production sequence is optimized;The concept of matter element information entropy and analytic hierarchy process were used to calculate and predict the overall health of the workshop.Plant Simulation software was used to build the simulation model of the wafer production line,and the balance and bottleneck positions of the production line were analyzed.The effect of equipment failure rate and temporary storage capacity on the output was analyzed through DOE experiment,and the corresponding improvement scheme was put forward.According to the improvement scheme,the production line output was increased by 14.5%.For hybrid process production sequence problem,put forward to minimize the production cost and comprehensive optimization target of minimizing the total production time,to design genetic algorithm combining with model simulation evaluation,optimize the order of the actual production line put into production order,the total production time reduced the 48 points 25 seconds,the production cost was reduced by 11.9%,The efficiency of the production line has been significantly improved.Analytic hierarchy process and matter-element information entropy were used to calculate the influence weight of each factor index on the health degree of the production line,and then combined the influence weight calculated by the two methods to calculate the health degree of the production line.Finally,GA-SVM method was used to build a prediction model to simulate and predict the health of the production line.The simulation results show that the model can accurately predict the running state of the production line and provide important data support for the production scheduling and equipment maintenance of the workshop.