Microwave Field Near Field Imaging With Submicron Resolution

With the improvement of circuit design ability and manufacturing technology level,the chip size is getting smaller and smaller,the chip size and complexity are greatly increased,how to achieve the non-invasive detection of the chip at a higher resolution is becoming very important.NV color center is short for nitrogen vacancy luminescence center.It is a point defect in diamond with C_3v symmetry,which is composed of a substituted nitrogen atom and a vacancy.NV color center has excellent optical properties,is a single photon source with excellent performance,has a long spin coherent life at room temperature,can be used to initialize and read its quantum state by optical method,so it can be used in quantum magnetic field detection and imaging.In this paper,a submicron resolution microwave field near field imaging system based on submicron diamond NV color center crystal is proposed.It mainly consists of optical hardware system and software control system,which can be used for nondestructive imaging of microwave field with submicron resolution on the surface of microwave integrated circuit.In this paper,a tapered fiber probe is used to improve the collection efficiency of fluorescence signal and the signal-to-noise ratio of weak signal.In this paper,by setting the synchronous pulse sequence control system and combining with the software post-processing method,the differential and multiple measurement averaging are realized,so as to reduce the noise interference,suppress the common mode noise caused by laser fluctuation and the influence of optical shot noise on the extremely weak signal,and greatly improve the signal-to-noise ratio of the system.In this paper,the microwave field imaging of a coplanar waveguide microstrip filter at different microwave frequencies is carried out to verify its S21 parameter characteristics,and the results are compared with those measured by the Langer magnetic field probe.The accuracy of the imaging results of the submicron resolved microwave field near field imaging system is verified.A submicron resolution microwave field near field imaging system based on submicron diamond NV color center crystal is proposed in this paper.It has no interference to the microwave field of the measuring device and the resolution can reach the submicron level,which is of great significance to chip test and verification,electromagnetic compatibility test and failure analysis.