Research On Surface Electromagnetic Field Scanning System Of Broadband Chip

In recent years,quantum precision measurement,as one of the applications of quantum mechanics,has gradually surpassed traditional testing techniques in terms of measurement resolution,sensitivity,and stability.Especially in the advantage of improving the resolution,for today’s increasingly developing integrated circuit industry,the increasingly complex internal structure of the chip makes it difficult for traditional testing techniques to work,which makes the quantum precision measurement system based on diamond NV color center.It has attracted extensive attention in the field of integrated circuit testing.The diamond NV color center is a luminescent defect in diamond.It has a long electron spin coherence time and excellent optical properties.It can realize the manipulation and reading of quantum states at room temperature and pressure.It is a quantum precision measurement system.It is a very suitable system for microwave magnetic field measurement.In this paper,a fiber-optic diamond magnetic field measurement probe is designed.By fixing the diamond at the end of the tapered fiber,the probe can be placed close to the microwave device.Since diamond is a non-metallic material,it also avoids the magnetic field interference of the probe and can accurately measure the to-be-measured The magnitude of the magnetic field of the device.In order to improve the signal-to-noise ratio of the whole system,a pulse subcarrier modulation method is proposed,which uses an arbitrary sequence pulse generator to realize the synchronization of laser pulses,microwave pulses and microwave modulation signals,and the collected signals are detected by a spectrum analyzer.Compared with the traditional Optical Detected Magnetic Resonance(ODMR),the method greatly improves the signal-to-noise ratio.In order to expand the test frequency,this paper also proposes a diamond NV color center orientation method.After orientation,the diamond sample can tune the NV color center resonance frequency by changing the size of static magnetic field.At the same time,it innovatively introduced a robotic arm into the diamond NV color center testing system,and completed the orientation of the NV color center and the scanning imaging of the magnetic field measurement process through the robotic arm,which greatly improved the automation of the system.In order to verify this scheme,the microstrip antenna with a resonant frequency of 2.87 GHz was tested experimentally,and the measurement frequency was continuously increased to close to 15 GHz.Magnetic field scanning imaging was also performed at different operating frequencies of the microstrip antenna,and the test results were compared with the simulation results to verify The reliability of the modified system in chip broadband electromagnetic field measurement.