Study Of Microwave Magnetic Field Measurement Technique With Sub-micron Resolution

In the post-Moore era,the chip operating frequency and integration are getting higher and higher,and the problem of electromagnetic interference between the modules inside the chip is becoming more and more prominent.Therefore,the wafer-level EMC design and measurement technique has become an inevitable trend.However,the existing EMC test technology is mainly based on the small-loop antenna principle,while the spatial resolution and operating frequency are approaching engineering limits,which cannot meet the demand of wafer-level EMC test.This has led to longer development cycles and higher development costs for advanced chips.Nitrogen-Vacancy color center(NV color center)is a luminescent atomic defect with excellent optical properties and long spin coherence time at room temperature,which can be initialized and read by laser pumping at room temperature.This material has important applications in the field of high-resolution magnetic sensing.In this thesis,a micron-sized tapered optic fiber quantum probe is designed.The system for making the probe is also optimized.The fluorescence of micrometer crystals is very weak.As the fluorescence of micron crystals is very weak,simulation software was used to optimise the collection efficiency of the optic fiber probe by simulating the diameter of surface and the length of the taper.The study obtained sub-micron size diamond particles suitable for short taper length(below 500 μm).Experiments have shown that the fluorescence collection efficiency of the tapered fiber is improved by more than 12 times compared to the normal fiber.This demonstrates the superiority of tapered fibers.In this thesis,a microwave magnetic field imaging system based on the diamond NV colour center is presented.The system is mainly composed of optical module,control module and software module.The optical module mainly extracts the fluorescent photon count by confocal optical path and single photon counter.The control module is used to control the synchronization switch of laser and microwave and scanning of the device to be measured.Meanwhile,the software module mainly performs the analysis and display of the photoelectric signal.This paper implements the microwave magnetic field scanning imaging of power amplifier chips,which is expected to provide a new measurement solution in electromagnetic compatibility performance testing and failure analysis of sub-micron chips.In this thesis,a quantum near-field probe is used to characterize the micron-level leakage of the electromagnetic shielding film.Micron-scale defects are artificially introduced into the electromagnetic shielding film and the microwave magnetic field leakage from the defect is measured.The magnetic field strength of the probe was probed at different heights on the device surface and its microwave field distribution was scanned by covering it with an electromagnetic shielding film.The measured results are compared with the induced EMF probe to verify the feasibility of a diamond NV colour center based microwave magnetic field imaging system for electromagnetic shielding performance studies.In this thesis,the diamond NV color center based microwave magnetic field measurement method proposed has the advantages of high resolution,small perturbation,small size,quantum calibration,and the working frequency can be extended to millimeter wave band,which can be applied to sub-micron resolution microwave magnetic field measurement technology and is of great significance in the future wafer-level chip EMC testing and electromagnetic shielding performance research.