MMIC Chip Surface Microwave Magnetic Field Imaging Method And System

NV(Nitrogen-Vacancy)color center is a kind of point defect structure among various luminous defects of diamond.The NV color center has stable optical properties and is a single-photon source with good performance.It has a long spin-coherent lifetime at room temperature and is widely used in bio-fluorescent labeling and quantum precision measurement.To meet the requirements of high-resolution microwave magnetic field measurement on the surface of the chip,this paper studies the microwave magnetic field measurement method based on the fiber diamond NV color center,and realizes the high-resolution measurement and imaging of the microwave magnetic field on the surface of microwave devices such as antennas and microwave chips(Monolithic Microwave Integrated Circuits,MMIC).This method is of great significance for chip-level electromagnetic compatibility and chip failure analysis.The main research content of this paper is as follows:1.A micron diamond NV color center probe attached to the tip of tapered fiber is developed.The optical excitation efficiency and fluorescence collection efficiency is improved by using tapered optical fiber.The controllable preparation of fixing a single micron diamond crystal at the end of tapered fiber is realized.2.A pulse subcarrier modulation method is proposed,which overcomes the key technology of laser pulse control and quantum state manipulation microwave pulse control synchronization,greatly improves the signal-to-noise ratio and real-time measurement of the system,and the sensitivity of microwave magnetic field reaches 5n T/?Hz.The microwave magnetic field distribution on the axis of the small helical antenna is measured,which is in good agreement with the HFSS simulation results,verifying the measurement accuracy of the fiber-optic diamond microwave magnetic field probe.3.High-resolution measurement of the surface microwave magnetic field of the planar antenna and MMIC chip is realized.Compared with the sate-of-the-art surface scan method,the fiber diamond probe can measure the microwave magnetic field with close proximity to the chip surface,and the probe size approaches micrometer to sub-micron.The imaging result directly reflects the chip wiring and current distribution.This thesis proposes a microwave magnetic field quantum precision measurement methodbased on the fiber diamond NV color center,which has the characteristics of low interference,high resolution,high sensitivity and quantum calibration.It is of great significance to IC verification test,electromagnetic compatibility test and failure analysis.