Optimization Research Of Electron Beam Coating Control System

In order to lead the development trend of the future manufacturing industry and promote the development of the intelligent equipment industry,China has proposed the "Made in China 2025" strong country strategy,and the integration of Internet of Things,intelligence and network manufacturing has been listed as three areas of priority development.In this context,the optimization of the old equipment to upgrade the manufacturing site,not only can save the purchase cost of large new equipment,but also improve the quality of the product.The development of electron beam coating machines is related to the development of computer technology.Based on the in-depth study of the principle and control flow of electron beam coating process,this paper focuses on the problems of insufficient tuning of conventional PID parameters of the electron beam evaporation equipment control system,poor automation control capability,vacuum system management,and equipment information islands.The hardware was studied in two aspects,and the electron beam vacuum coating control system based on IQM-233 thin film deposition PCIe expansion card was designed.In order to solve the sudden failure problem of quartz crystal sensor,the function of automatic switching of double crystal oscillator is realized.For the nonlinear characteristics of evaporation source system,the design scheme of on-line setting of fuzzy PI parameters is proposed;it is compatible with the modification of old system.In the aspect of the Internet of Things,this paper studies the implementation of EAP function based on Web Service architecture,making the control system simple and efficient.The way is integrated into the CIM system.The online functional test and actual test run show that the process of the electron beam vacuum coating system is stable,the fluctuation of the evaporation rate is well suppressed,and the interoperability with the MES system is realized,and the control field from the process control system(PCS)is realized.To the extension of the Production Execution System(MES),the control system has made certain progress in the application of engineering intelligence,which has very important practical significance.