The Design Of The Precision Measuring System Of Dicing Saw

With the progress of science and technology,the rapid development of semiconductor industry in twenty-first Century,the market of dicing saw is constantly expanding.Dicing saw belongs to the field of semiconductor packaging equipment,the equipment is mainly used for silicon integrated circuit chip,two,transistor,LED chip,piezoelectric ceramic,quartz,Ga As,sapphire,iron oxide,glass fiber cutting processing.Dicing saw is the first key device in the production of semiconductor chips.The function of dicing saw is to cut the chip into a cell chip and prepare for the next bonding process.Therefore,the performance of dicing saw directly affects the chip yield,yield and production efficiency.At present,there are not many manufacturers of dicing saw equipment in China.At the same time,the level of dicing saw technology is still far from that of foreign advanced equipment,and lacks competitiveness in the market.Facing the urgent needs of the market,improving the performance index of dicing saw is of great significance to the domestic semiconductor industry.Aiming at the technical problems of dicing saw equipment,the height measurement technique of scribing machine is the research direction of this paper.Height measurement technology is a key technology of dicing saw,high altitude measurement data is the key to cutting data,the accuracy and reliability of dicing saw cutting,but also is related to the main shaft and blade suction cups and job security.In order to obtain accurate measurement height data,a precise height measurement system is designed.This paper first introduces the working principle and application function of height finding system.Then expound the method of mechanical structure and electronic control type altimeter system,based on the proposed altimeter system's hardware and software design is given including the system,process design and PC monitoring interface,and explained the design method to improve the reliability of the system.Through experimental verification,the test results show that the accuracy of the measuring system is at the micrometer level,the depth of the cutting depth is 5?m,and the response time of the high system is 50 ms.It basically meets the design requirements of high stability,reliability,high accuracy and fast response.