Research On Geometric Error Modeling And Experimental For Dicing Saw

With the rapid growth of the semiconductor industry,the demand for semiconductor equipment has increased dramatically.As the key cutting equipment of the chip packaging process,its cutting accuracy directly determines the quality of the chip.At present,there is a gap between the domestic scribing machine and the imported scribing machine in terms of cutting accuracy,processing efficiency,system stability,and with the development of IC packaging technology in the direction of fine pitch,large size,the cutting accuracy requirements for the scribing machine will become more demanding.In order to improve the cutting accuracy of scribing machines,it is important to conduct research on scribing machine error modeling and identify the key error factors to guide and optimize the design and error compensation of scribing machines.In this paper,the error modeling of the independently developed scribing machine is carried out using the multi-body system modeling method,the method of checking the geometric error of the machine is introduced,the relationship between the knife mark width and the key geometric error is analyzed according to the actual tool motion error model of the scribing machine,the knife mark width model is established,and the accuracy prediction and experimental verification of the scribing machine is carried out according to the knife mark width model.Research has been carried out in the following areas:(1)Discussed the semiconductor market and the current situation of China's domestic scribing machine equipment,compared the domestic and foreign scribing machine research,pointed out that the domestic scribing machine compared to foreign advanced scribing machine in processing accuracy,summarized the development of precision machine tool geometric error modeling;(2)For the self-developed precision automatic single-axis scribing machine,the error modeling method of multi-body system theory was used to establish the integrated error model.The error of scribing machine is analyzed,and 45 unit errors are proposed;the flush-transformation feature matrix between adjacent units of scribing machine is established,including the feature matrix of ideal stationary,actual stationary,ideal motion,actual motion;the deviation of the coordinates of the tool forming point in the machine base coordinate system and the coordinates of the workpiece cutting point in the machine base coordinate system is used to find the integrated error model;(3)By analyzing the errors of the scribing machine.The common error detection method is introduced in detail,the positioning error of each axis of motion is measured by laser interferometer,the linear error of motion of each axis of motion and the position and attitude error of each unit body are measured by marble square and multimeter,and the angular error of each axis of motion is determined by the error recognition method;(4)Through the comprehensive error model of the scribing machine,the actual motion error model of the scribing machine tool is established according to the order of the cutting process,and the effect of the motion error of the tool on the width of the cutter is analyzed,and the cutter width model of the scribing machine is deduced,and the key errors affecting the width of the cutter are identified,which is a good guide for the precision design and error compensation with the scribing machine.At the same time,the cutting accuracy of the machine can be predicted based on this scar width model,and cutting experiments have been conducted to verify the effectiveness of predicting the cutting accuracy based on the scribing machine scar width model.