The Development & Optimization Of MES In FAB

With the fast development of semiconductor industry, semiconductor products become more diverse and the corresponding process becomes more sophisticated and complex. A comprehensive, efficient and convenient Manufacturing Execution System (MES) is especially important for delivering high-quality products on time, keeping high throughput and yield as well as reducing the cost of production.In this paper, as a core system for semiconductor manufacturing, MES will be introduced. MES system provides main functions such as the production process control and supervision, the management of the machine, the product yield control. Then considering the status of MES development, the future MES development direction and optimization is proposed. Applying the MES, the advanced process control (APC) used in the CMP, lithography and furnace process is studied; the management of the expensive machine tools, especially the preventive maintenance system is studied; the data collection and analysis function of semiconductor processes is studied, which helps to find the defect as soon as possible. The Fault Detection and Classification (FDC) is introduced, which aims to resolve the insufficient data and analysis lag issue of the data collection and analysis. Also, the optimization of FDC is studied.