Large-scale Semiconductor Manufacturing Structured Accurate Maintenance Of The System Design And Development

Due to the continuous vertical ramping of volume, the traditional time-based planned maintenance with static task list is weaker and weaker to meet the requirement for production. Extended Unscheduled-Down-Time, unpredictable equipment performance after maintenance and enlarged variation among same kind of equipment has become the barriers to further enlarge the factory's capacity. This paper explores a way to design structural high precise maintenance system based on existing research accomplishment and the factory reality, and got the following achievement:Build a well designed maintenance data collecting & analysis process; With multiple maintenance modes combined, it maintains a highly predictable macro manufacturing system; Initiate a production oriented dynamic maintenance scheduling process which process maximizes the support to production; Introduces data monitoring and analysis into maintenance scheduling process which greatly improves the value of time during maintenance activity. Implement an flawless connection between data analysis and maintenance activity through integration of people management and maintenance improvement project management.