Preventive Maintenance Scheduling In Semiconductor Parallel Production Lines And Evaluation Of System Design And Implementation,

This paper based on the research project comes from Sichuan Youth Foundation project"Roundabout production process oriented multi-objective production planning research". Semiconductor manufacturers use a large number of parallel flexible production lines, the flexible production lines are produced by changing the parameters to process different products, but the multi-product production makes the preventative maintenance scheduling and preventative maintenance measurement more difficult. Proper measurement of preventative maintenances is the basis of correct implmention of preventative maintenances scheduling while accurate scheduling is a prerequisite to implement preventive maintenance. This thesis is devoted to designing and developing a system to optimize the maintenance schedule and find the proper measurement of parallel production lines in semiconductor factories.The beginning part is the modeling of preventative maintenance scheduling. Gives detailed analysis of parallel production lines with multi-product in semiconductor factory. After the explanation of the various constraints which should be concerned in preventive maintenance schedule, establishes the preventive maintenance scheduling model which chooses the maximal of production as the objective function and multi-product production, preventive maintenance time windows, maintenance groups as the constraints. The successful solution of preventive maintenance scheduling example in a semiconductor manufacturing factory is the proof of the accuracy and usefulness of the model.The fowolling part is the metrics building of performance mersurement of preventive maintenance. Gives detailed analysis of the current classification of maintenance indicators. Chooses PM duration, follow-up product quality and equipment performance as the memembers of the measurement index system. The most popular machine performance metric has been found that it could be influenced by the man-made scheduling factors. Another equipment performance indicator which eliminates the impact of the man-made scheduling factors was found for maintenance measurement. The correlation analysis between the old indictors and new indictors in two different lengths of sampling periods finalizes the selection of the sampling period.Finally, based on the above models and indicators system, according to the actual situation of a semiconductor assembly and test plant, designes the function structure , business processes, databases of semiconductor manufacturing and evaluation of preventive maintenance scheduling system, proposes the specific algorithm for scheduling, preventive maintenance assessment data preprocessing algorithms, and the effective way to draw charts for performance measurement. The system has been developed on Windows platform using Microsoft Visual Studio2008 integrated development environment with Microsoft SQL Server2000 and Oracle10g database, and verified the reliability and accuracy by an example of the system running.