Microprobe Automatic Test System And Performance Research

Increasingly small and integration of IC manufacturing has led to ever-increasing costs of IC test. At present, probe test technology has become one of the important ways to IC product performance testing. But because contacting with the IC during the test, the probe fails caused by the wear and tear of internal spring, needle and syringe, for which this paper has developed a kind of probe performance and life of automatic test system aiming at the assessment of the performance and life of the probe, which has the characteristics of high degree of automation, high speed and accuracy. the main research work includes:1. Constructed an experimental system can automatically test the performance and life of the microprobe, the system can achieve accurate testing for micro-probe resistance and pressure in compressing process. And through the self-designed test fixture, the system can also be completed less than or equal to7x8array probe test and single probe test.2. Based on virtual instrument software Lab VIEW, it used the modular concept to develop and integrate motion control procedures and data collection procedures. It has achieved precise control and automated test of the system, and has beautified the human-machine control interface.3. By studying the effects of test speed and compression displacement on the probe performance, it has shown compression displacement is the main factor to affect the probe resistance and contact pressure. Probe resistance decreases with the increasing of compressive displacement, but when it reached0.3mm, the resistance remained stable; while probe contact pressure increases with increasing compressive displacement through linear relationship. However, test speed has no effect on the probe resistance, but it will influence the interval of reaching stability state of contact pressure.4. By automatic testing probe life, It turned out that different probes have different life. Some probes began to greater fluctuation.after50,000times, while some probes have a life expectancy of nearly20million times, but the pressure of probes have the same trends, and the probes pressure slowly decreases with the increase in the number of test.In short, the system has integrated the motion control and data acquisition, can high speedily, efficiently and accurately automatic test probes performance and assess the life of probes, therefore has some theoretical significance and practical value.