A Typical Fuze Mems Micro Spring Reliability Research

As the mainly part of fuze mechanism, MEMS S&A takes the charges of assuringthe safeties of assured devices and mechanisms in the period of service and emission,arming devices properly to make the whole fuze into launching status. The failure of theMEMS S&A device will lead to the loss of fuze performance, which would endangerthe safety of the relevant user and impact the combat effectiveness. The main part of theMEMS S&A device- micro spring, directly affect the whole mechanism to perform well.So it’s necessary to study the failure of the micro spring, provide reference for itsreliability analysis.In this paper first compared the common materials for MEMS device with Nimaterial in LIGA processing technology, introduced the working principle of the wholeMEMS S&A device, dynamically simulated the characteristics of the micro springbased on material parameters and environmental factors, analyzed the spring reliabilityindexes like elastic deformation range, deformation characteristic and stressconcentrated area, then modeling the micro spring under these circumstances, usingaccelerated stress test method expose the failure of the micro spring happen. FinallyMachete Hammer impact experiment and spring tensile test are employed for analyzewhen the spring under different g value impact circumstance, using the high speedcamera to capture the whole process until the spring broken, verify the failure mode andmechanism of the spring in different scale. The test proved the analysis accurate of thetheoretical analysis results, provide evidence and support for the design and reliabilityresearch of the micro spring.