Research On Design And Processing Methods Of MEMS Micro Actuators Used In Fuzes

Deviser’s traditional designing method has been changed after the application of MEMS in the field of fuzes, which in the same time accelerates fuzes’ miniaturization,intelligentization and integration. Bearing such advantages as small, low cost and high reliability, MEMS can provide more space for multi-sensor detection circuit and main charge so as to improve the accuracy and lethality of ammunition.A new-type MEMS micro actuators used in fuzes is discussed in this paper, with an emphasis on the detailed designation of zig-zag groove, microcoil and dislocation blocking mechanism, under which locking function can be realized without the dependency on deformation. Therefore, the reliability of MEMS micro actuators used in fuzes is increased effectively.This paper first starts from a brief introduction about the basic construction and principle of several typical MEMS micro actuators as well as their applications in the fields of military and fuzes, based on which a new design project of MEMS micro actuator with the time delay function that used in fuzes will be proposed. Then the focused design will be carried forward on the zig-zag groove, microcoil and dislocation blocking mechanism. The dislocation blocking mechanism that designed in this paper can eliminate the problem of unreliable blocking caused by insufficient deformation in that it is mere a simple dislocation movement instead of a blocking function realized by deformation in traditional ones. Then the technology of UV-LIGA is used for the preparation of the major structure of MEMS micro actuators that used in fuzes after the comparison among UV-LIGA and micro-EDM. While micro-EDM processing can also be applied to cost saving in case that the accuracy is not so high. Finally, the relationship between processing parameter and quality and the preparation method of micro electrode will be concluded after a large number of experiments on processingMEMS micro devices used in fuzes by micro-EDM. What’s more, this can also serve as a reference for the production of MEMS micro devices later.