Study On High Power Nd:YAG Laser Scanning Galvanometer System

As an accurate, reliable, efficient and nearly perfect machining tool, laser processing systems are absorbing more and more extensive attentions in the past years. Laser scanning galvanometer system can availably improve the efficiency and quality of laser processing greatly, and hence has gotten wide applications. At present, the domestic laser scanning galvanometer system are mainly used in a low-power laser application stage, such as laser marking system. With the promotion of high-power laser processing application, new requirements were put forward to the development of scanning galvanometer system.In this dissertation, a laser scanning galvanometer system under a high power Nd:YAG laser environment were studied. On the base of analysis for the scanning galvanometer system composition and working principle, we completed the optical design and mechanical design of system.The optical part was designed by the designing demands. First of all, we determined the structure of galvanometer and reflector according to the size of the incident light spot, then the study focused on the design of systemic F-θlens, using P-W method to calculate the initial structure of lens. Afterwards, we corrected the aberration by ZEMAX optical design software combining with aberration theory, and evaluated the image quality of designed lens through various image quality evaluation indexes. Mechanical parts of the system were designed by combining the SolidWorks and OptisWorks software. According to the mechanical size of various key parts, we design the appropriate mechanical structure, setting each part of the system as a whole, and finally confirm the design accuracy through software simulation.In the end, the various parts of the system were assembled and debugged on the basis of scanning galvanometer optical system requirements. The general capacities of scanning and focusing were also tested by experiment, to verify if the designed scanning galvanometer system can meet the requirements, and if it works in the high power laser environment. The results were positive, which demosntrated that the designed scanning galvanometer can be used in high power Nd:YAG laser system.