| With the development of laser technology, laser shows incomparable advantages in many areas because of its special excellent properties. Laser micro processing is an important direction in the applications of laser processing. In our country, the present laser micro processing research focuses in planar micro processing field. With the deepening of the laser micro processing application, the requirement of three dimensional micromachining has become more and more urgent. By existing 2D and quasi-threedimensional approach is difficult to achieve high-speed and high-precision machining.Therefore, develop a new 3D scanning and processing system will extend the aplication fielde of laser micromachining, shorten the gap with the developed countries.The proposal of integrate laser dynamic focusing system into micro processing system has been proposed. The existing quasi-three-dimensional laser processing system is analyzed.Through calculation, design and simulation by ZEMAX, the author designed a laser dynamic lens and implemented the large-scale 3D laser dynamic processing system.The 3D scanning area is 150mm×150mm×50mm.The thesis introduces the present situation of the current 3D laser processing and the insufficiency and introduces the principle of dynamic focusing system, including the priciple of galvanometer and optical lever. Optical design of ultraviolet telecentric F-Theta lens and dynamic focusing lens based on ZEMAX was introduced in detail. Voice coil actuator was selected for the driver of dynamic focusing lens.Large scale 3D dynamic scanning processing system has been built.The author puts forward two kinds of scanning methods-- quasi-three-dimensional scanning and dynamic focusing scanning. The dynamic focusing characteristics is studied through experiments. The two scanning methods has been verified by experiments. |
