Research On MCP's Chemical Treatment Process

MicroChannel plate (MCP) is an advanced type of two-dimensional electronic multiplier, which is the core component of image intensifier. The chemical etching and treatment is the key technology of MCP manufacturing process.Studying on characteristics of core and clad glass material of MCP, the effective process of MCP's chemical etching and treatment can be chosen. Using these process, the low noise, high gain and smooth channel of MCP can be manufactured.. At the same time, the defect of view-field can be decreased, such as emission point, dark point, Non-uniform etc. The qualified rate of manufacture MCP is raised.The micrograph morphology of microstructure of MCP was measured and characterized by high resolution optical microscope scanning electron microscope. The variation of composition on channel was analyzed by X-ray energy dispersion spectroscopy (X-EDS). The relationship between process parameters, which include etching time and ultrasonic cleaning, and characteristics of MCP were analyzed. The effective process of MCP's etching and cleaning was put forward. By this cleaning process, the emission points of view-field were decreased.