Investigation Of Microchannel Plate Based On Film Dynode

Microchannel plates?MCP?based on film dynode was designed and prepared in order to solve the contradiction between the resistance characteristics and characteristics of secondary electron emission in traditional micro channelplate.The AZO?ZnO and Al₂O₃ composite film?was selected as a conductive material,and the Si O₂ was selected as the secondary electron emission layer material.The thickness of the conductive layer and emission was respectively designed for 250?m and 5 nm.According to theoretical analysis,the atomic layer deposition process program of microchannel plate based on film dynode was put forward by the experiment research.The microchannel plates based on film dynode was prepared,and the resistance and electronic gain has been tested.The microchannel plate resistance decreases nonlinearly with the increase of the load voltage.When the load voltage is 800 V,the resistance is 110M?,and the gain is about 300.