Safety Risk Control Of Semiconductor Manufacturing

From TI showed the first integrated circuit board in1958,the development history of integrated circuit have gone through 50 years. IC has many advantages, like small size, light weight, long life and high reliability, it has been widely used in computer, communication and remote control and other fields, and become the basis of each industrial realizing information and intelligence. The level of IC manufacturing not only represents a country's technological and industry level, and also is the symbol of a nation's comprehensive strength.However, the IC manufacturing process is complicated, and strict to work environment, not only need to use a large number of highly toxic, corrosive or flammable chemicals, but also used in many high-temperature, high pressure, high energy-consuming equipment. There are lots of dangerous and harmful factors in process of IC manufacturing, and in the event of chemical fire, spill or poisoning incidents, the consequences would be disastrous.On the basis of researching IC manufacturing process deeply, and combined with the theory of risk identification, evaluation and control, this paper analysised risk factors of every process in IC manufacturing, then identified a total of 14 dangerous and harmful factors, and fix the site of their existence. The hazards of gas and chemical are the main risks of IC workshop, in all about 450 IC manufacturing process steps, probably used more than 300 different types of gases and chemicals, so this paper focuses on analyzing the use of gas and chemicals technology, and toxic and hazardous characteristics. On the basis of risk analysis, using preliminary hazard analysis and fault tree analysis to evaluate the production process of IC, blasting and burning of chemicals and the failure of high pressure gas cylinders, identifying the work procedure which has greater risk, and the risk factor which need to prevent stricter.Finally, on the basis of risk identification, analysis and evaluation, and combined with the related theory of risk control, according to risk control and risk management theory, bring forward risk control measures for IC production to control the risk factor in IC production workshop in full range and entire process way, including the use of gas, chemicals and fire detection systems and other control measures, and chemical safety management, equipment safety management, radiation safety management, electrical safety management and other safety management, and along with related safety measures in the design and technology.With the increasing of IC production and integration, the requirements of process equipment, environment and raw material are more stringent, the related risk control measures must be more stringent. With the rapid development in integrated circuit manufacturing industry, this study is bound to make a certain contribution to enhance risk control integrated circuit manufacturing plant, and reduce accident rates and accident losses.