| With the rapid development of artificial intelligence and Internet of things all over the world,the semiconductor industry is also following the rapid and vigorous development.Due to the excessive demand,the problem of "chip shortage" is gradually emerging.As a major manufacturer of electronic products,China is also actively developing the semiconductor industry.All localities are investing and building factories one after another in the hope of rapid production and high profits generated by the semiconductor industry.As we all know,semiconductor chips are inseparable from the assistance of special gases and chemicals in the processing and manufacturing process.Their wafers play an important role in protection,etching and coating in the manufacturing process,and have high requirements for the continuous and stable supply of gas chemicals in the whole process.Therefore,in order to achieve this overall goal,the stable production of gas and chemical system is very important.Due to the late start of domestic semiconductor development and the relative lack of production management of gas and chemical system,it is more urgent and important to incorporate lean production theory into the production management research of gas and chemical system in semiconductor factory,so as to improve the overall management level of gas and chemical system,improve efficiency and eliminate waste.Taking the gas and chemical system of Y semiconductor factory as the object,this thesis studies the application and implementation of lean production in gas and chemical system of Y semiconductor factory.Firstly,introduce the production line of gas and chemical system of Y semiconductor factory,understand the current gas and chemical system framework of Y semiconductor factory,and put forward the existing problems from the perspective of production management,including obvious waste of human resources,poor implementation of operation process,serious material waste,frequent equipment failures,etc.Secondly,in view of the problems raised,the problems existing in the current gas and chemical system of Y semiconductor factory are analyzed from the perspective of on-site management,including the lack of visual production guidance,imperfect on-site management system,inadequate implementation of standardized operation,incomplete equipment maintenance and other factors.Thirdly,combined with the research theory of lean production,establish the basic structure and objectives,and put forward the corresponding improvement measures.An optimization strategy is proposed based on analysis tools and methodology.Finally,safeguard measures are set up from the aspects of personnel training,organizational change,reward and punishment measures to achieve the expected objectives.Through the improvement of the management problems of the gas and chemical system of Y semiconductor factory,the problems existing in the current gas and chemical system of Y semiconductor factory are effectively corrected,the operation and maintenance degree of the system is improved from two aspects: the correct operation of personnel and the stable output of equipment,and the unnecessary waste in the process of system operation and maintenance is greatly reduced.Thus,it not only realizes the production goal of continuous and stable supply of gas and chemical system of Y semiconductor factory,but also provides a reliable guarantee for the good product manufacturing of chip production line.At the same time,it provides valuable practical experience for the production and operation of semiconductor gas and chemical system industry,and lays a solid foundation for more personnel engaged in the operation and maintenance of this system in the future. |