Design And Fabrication Of MOTFT Backplane Based On Solution Method

As a basic circuit component,metal oxide thin film transistor(MOTFT)has been widely studied in recent years for next-generation display applications including active matrix organic light emitting diodes(AMOLEDs).MOTFTs have higher carrier mobility than amorphous silicon(a-Si)TFTs and lower manufacturing costs than low temperature polysilicon(LTPS)TFTs.From the point of view of device manufacturing,inkjet printing is one of the most attractive technologies because it can be fabricated by digital patterning layout methods,providing a huge opportunity for low cost and flexible thin film devices.AMOLED is a self-luminous display that has several advantages over AMLCD,such as thin and light profile,wider viewing angle and faster response time,which has become a research hotspot for next-generation flat panel display.However,the research on the application of inkjet printing MOTFT to the AMOLED backplane fabrication process has yet to be improved,especially in optimizing the performance of inkjet printing MOTFT devices and improving the backplane process compatibility.Therefore,this paper optimizes the printing ink and device structure,and uses the inkjet printing to fabricate MOTFT with different film thickness and structure,and analyzes the mechanism.Then,the inkjet printing MOTFT is applied to the AMOLED backplane layout design,and the compatibility problem between the solution method and the conventional lithography process is solved.The AMOLED backplane based on the solution method MOTFT is fabricated.In this paper,single-layer MOTFTs and heterojunction MOTFTs are first fabricated by inkjet printing.By modifying and optimizing the ink on the surface of the substrate,and adjusting the droplet size and the flying state of the printing ink during the fabrication process,high performance MOTFT devices and uniform arrays were obtained.The analysis of the MOTFT device based on inkjet printing process,the structural design and critical dimension design of the TFT backplane are carried out.The first backplane design layout is 1.8 inches,and the resolution is 64*64,which combines the existing lithography process and inkjet printing process to adjust and perfect the key dimension design of the pixel.The second edition layout is 5 inches,with 320*240 resolution,which is capable of displaying dynamic video.Finally,1.8-inch AMOLED backplane was completed according to the design of which the core functional layer are based on the solution method MOTFT.The integrated preparation and testing of printed display panels was carried out,which provided the core technology and scientific basis for printed TFT display applications.The key technology for compatibility between solution method and traditional process is realized,and the large-area integration process technology of printed TFT panel is mastered,which lays a foundation for the industrialization of printed TFT technology.