Research And Design Of Management-Control Integration System Of Sand-wheel Slice Cutting Machine

With the increasing progress of science and technology,semiconductor chip has become the foundation for the electronic and information industry,and the scribing of silicon wafer processing is one of most important process in the production of semiconductor chips,so the performance of the sand-wheel slice cutting machine will directly affect the quality and yield of entire semiconductor product.With the expansion of semiconductor market,thinner thickness of the silicon wafer and smaller width of the cutting width,the improvement of production technology puts forward the higher request on the performance of the sand-wheel slice cutting machine.At present,the domestic sand-wheel slice cutting machine may be few in number,and has a big gap on technical level compared with the overseas advanced equipment.Therefore,developing a set of practical high-performance wafer scribing control integration system to break the monopoly of foreign technology and promote independent research and development ability of electronic equipment industry in our country is of great significance.Therefore,we take high precision sand-wheel slice cutting device as the object of our study.We have developed sand-wheel slice cutting process management system,motion control system and cutting process monitoring system,realized the high precision sand-wheel slice cutting system management and control integration,specific research work includes:(1)Study the hardware structure of high precision sand-wheel slice cutting device,analyze and select the perform component of device,and develop a management-control integration system of sand-wheel slice cutting machine according to the characteristic of sand-wheel slice cutting process.(2)Analyze and discuss the influence of technological parameters and sand-wheel blade parameters on machining precision,access process database through the ADO.Net database access technology,which is constructed by SQL Sever database software.(3)Analyze the motion control theory in the process of sand-wheel slice cutting,prove the feasibility of closed-loop motion control by using compounding feedforward control,communicate industrial PC with motion controller by using serial port communication,motion compensation techniques are used to guarantee the high precision of motion control in sand-wheel slice cutting.(4)Analyze and study the monitoring method in control system of sand-wheel slice cutting machine,realize the sand-wheel blade wear monitoring,power monitoring and spindle condition monitoring,to ensure control system is stable and reliable in actual manufacturing practice.The management-control integration system developed on this research has been applied in the automatic sand-wheel slice cutting machine,and successfully processed the prototype of 6 inches of hard brittle materials such as silicon wafers on the actual engineering verification at the same time.It also has good reference value for the research and development of slice cutting machine's control software and other control software of the same kind of equipment.