Optimized Design And Implementation Of Semiconductor Equipment Control System

Facing market monopoly and technology blockade from overseas,independent research of semiconductor equipment is not only the urgent need of the domestic market,but also the embodiment of the national will.In this paper,the optimized design scheme of semiconductor device is put forward from the aspects of control program,motion performance,control function and communication mechanism,the design and implementation of the optimized content are described in detail by introducing the development of the slave system of intelligent sorting machine.Aiming at the unstructured design for PLC ladder program,based on the modular design of software engineering,the hierarchical ladder structure is constructed,and the "low coupling,high cohesion" design of timing modules and motion modules is proposed.Based on three basic control structures,the general motion models are designed to meet varied design requirements.The adjustment of servo parameters,running precision and speed determine the performance of the system.Based on PID,"response priority" and "stable priority" are specified in two ways to manually adjust servo parameters.Electronic gear ratio,vibration control,backlash compensation and S-curve control as the main improvements are introduced.Aiming at the low degree of automation and the unreliable exception handling mechanism of the system,the main content of the control capability upgrade program is presented.The "trajectory real-time control" function and the automatic alarm function of the sorting machine are expounded to illustrate the specific design process.Putting forward the method of establishing "one to many" communication between PLC and PC by the industrial communication network of sorting machine.The basic principle of multi-transport buffer channel mechanism and the execution timing of MSG-RCV are introduced in detail,and the relationship between communication efficiency and PLC high-speed scanning period is analyzed.System optimized design is a comprehensive engineering problem,and it is the key and the core to analyze and solve the optimal control problem in many aspects.