Design And Implementation Of Equipment Preventive Predictive Maintenance System In Semiconductor Enterprises

With the acceleration of economic integration,semiconductor enterprises are facing increasingly fierce competition.In today's market environment of fierce competition,semiconductor enterprises must have stronger market competitiveness if they want to occupy more market shares.More new equipment can be invested to expand production capacity in order to expand market share in the boom period,but the investment of new equipment must bring more capital investment,and the effect cycle is long;And the improvement of equipment integrated efficiency(OEE)not only saves money but also results quickly.Therefore,semiconductor companies need a solution that maximizes the overall benefit of equipment by extending the life of equipment through regular inspection,minimizing the frequency of equipment failures and ensuring that equipment is in normal operation at all times.According to the problem of equipment loss in semiconductor industry,this paper has done the related research and realized the preventive maintenance management system.The system conforms to the system on-line standard.The system provides a preventive maintenance solution that covers the entire workflow of a semiconductor enterprise.Data exchange format with equipment in accordance with GB/T 35010.8-2018 semiconductor chip products-Part 8:EXPRESS format for data exchange.The core functions of the system include:(1)JobPlan Management:By setting the JobPlan template provided by PPM,the time and resources required for PM(preventive maintenance)and BM(failure maintenance)tasks can be reduced to a minimum.(2)TBM(Time-based Maintenance):By providing maintenance on a regular basis,any anomalies can be detected,thus preventing failures.(3)CBM(Conditional Based Maintenance):It can detect any anomalies and provide maintenance when predefined conditions are met,thus preventing failures.(4)Work order management:by managing and recording all equipment activities,so as to prevent equipment failure in advance.Maximize the efficiency of equipment by minimizing the frequency of failure,extending equipment life through regular inspections,and ensuring that the equipment is functioning properly at all times,thus greatly reducing maintenance costs.(5)Component management:Maximize equipment performance through continuous management of components and equipment to keep equipment in optimum condition.The system has been run in WUXI H Semiconductor Company,and the application results verify the feasibility and practicability of the design model.The system uses cluster technology to form a service Dr Environment to ensure that users' business programs provide uninterrupted services and the application system runs stably.