Design And Implementation Of Management System For Semiconductor Factory Equipment Maintenance

In a semiconductor wafer fabrication plant,there are six types of equipment:diff,tf,litho,etch,wet,wat.The equipment maintenance management is crucial for wafer manufacturing.B company is a domestic semiconductor wafer fabrication plant, in the process of semiconductor equipment maintenance management There are several problems in the factory:the efficiency of making work planning artificially is low, the work plan made by excel cannot automatic warning the engineer, the use of the trouble equipment will leadto a decline of the products quality, it is waste of time that the engineer enter the factory to inspection equipment everyday, whether the device needs PM(Preventive maintenance) could only be artificial judged, the process and result of the equipment maintenance can not be monitoring.This article based on the analysis of problems above, we propose two schemes, equipment maintenance optimization scheme based on time and equipment maintenance optimization scheme based on rules, design and Implement a equipment monitoring and maintenance management system, the functions of the system include: make the equipment maintenance plan based on time, make the equipment maintenance plan based on rules parameter setting, equipment maintenance work notice, record maintenance work, work report. Test and application showed that the system is feasible and effective.Compared with other similar systems, the main research work in this paper has the following characteristics:1.For the collection of the facility maintenance required parameter, through the SECS(semiconductor production equipment communication standard) communication protocol and RV middleware technology, realize the function of parameter information collection equipment. The application shows that, the system reduced the engineer equipment regular workload, and significantly improved the work efficiency of the engineer.2.For the problem of whether the equipment need to be PM(Preventive Maintenance) could only be judged manually, And the trouble equipment continue to use lead to product quality declining, the realization of the equipment maintenance function based on rules, using computer automatic judgment to replace the manual judgment, application shows that the system improves the engineer work efficiency.3.For the low efficiency of artificial make work plan using Excel, work plan record by Excel cannot automatic warning the engineer, work plan automatic generation is realized by production planning automatic generation based on time feature. The application shows that, the efficiency of system significantly improves the engineer work plan.