Research On Semiconductor Equipment Contrl System Based On Windows CE

This paper presents architecture and key technology of Windows CE OS, analyses modules of semiconductor equipment control system, builds a Windows CE-based software development environment, accomplishes the customization of Windows CE OS and development of control system application software.In this paper embedded system and Windows CE is researched, including Windows CE Boot Loader, device driver, Windows CE serial port communication and related hardware platform eBox4850. Then hardware and software modules are introduced. Semiconductor equipment control system implements acquisition, storage, process control and chart display of multi-channel real-time data. Users could customize and edit process file. Then system could load process file and execute every step in it. Related data could be saved in log files during the execution of process.Platform Builder 5.0 is used as the tool of customizing Windows CE OS. The application software is developed using C# and .NET Compact Framework 2.0, which saves much time and decreases cost. This system has a friendly user interface and could run steadily. Many tests have been implemented to prove that this control system could satisfy users' needs.