| With the improvement of computer hardware and communication technology which make the high speed, high volume data transfer become very much cost effective has make a major impact on the traditional industrial control field. The industrial control is now going towards networking as the high speed data transfer make "real time" achieable while the cost has become affordable. The readily available Ethernet has reached a speed that it is feasible to apply it in the industrial control network nowadays. Together with other embedded, wireless and control technologies it has opened up many opportunities of applying the Ethernet on control field.This thesis studies the data communication in back end semiconductor equipments using the TCP/IP protocol. The TCP/IP is widely used and the technologies are well proven. It would also make the machine well independent from the hardware. The TCP/IP's communication working under three major operating systems, namely, DOS, Window2000 and Linux are investigated with the application on the data transfer between semiconductor equipments. Different library functions are developed to work on the above operating systems.In Window2000 system, Window Socket (WinSock) API is used to achieve the lower level communication. In DOS system, WATTCP LIB driver LIB is used. In Linux system, QT was utilised for the low level communication.The interface programs to test the performance of the TCP/IP communication are developed and their performance measured. It is found that they are satisfactory for the semiconductor equipment's real time communication requirments. |