Study Of QFP Semiconductor Dimension Inspection Equipment

More and more automatic equipments have been applied in the semiconductor manufacturing.Now,in semiconductor assembly back end process,automatic visual inspection system plays an important role,especially for the accurate measurement of the lead dimension on the QFP(Quad Flat Pack)semiconductor products.In order to meet the requirement of the semiconductor manufacturing,we study and design an automatic measurement equipment to measure the lead dimension of the QFP semiconductor,which is after trim form process.The key point of the design is the handler of this equipment,and it has the perfect combination with the industry-recognized visual inspection system to realize the accurate measurement of the lead dimension on the QFP semiconductor products with low cost.The design includes the following sections:1.Study and design for hardware.Referring to the current automatic measurement equipment we are using now,this thesis redesigns the sorting system and mechanical structure,and it sets up drive system with two axes to realize the function of product pick and release.It also realizes the position conversion among three different dimensions of products through two air cylinders' combination.According to the requirement of positional accuracy,the servo motor and stepping motor are selected reasonably.In the aspect of electric,with ADlink four axes motor control card and HSL I/O control card,motion control system of this equipment is set up.Based on the signal definition of visual inspection system,the transfer for visual signal and I/O card signal is also designed.2.Study and design for software.Control program of the equipment is developed by Boland C++ software,sharing by the same industrial personal computer to realize the low cost.The control program includes automatic operation,program selection,manual control,position calibration,alarm display and test run.This equipment in this thesis measures the lead dimension on the QFP semiconductor products with high accuracy.It takes place of manual measurement with projector.The cost of this equipment is lower than that of the overall measurement equipment.It is a case of study and design with lower cost.