Design And Implementation Of 200mm Silicon Epitaxial Software Control System

As the focus of the world economy competition, the integrated circuit industry has increasingly become the lifeline of economic development and national defense security. During the "Twelfth Five Year Plan" period, the state in a semiconductor integrated circuit manufacturing equipment attaches great importance to establishment and development with completely independent intellectual property of integrated circuit equipment industry, breakthroughs in equipment and software R & D and production, to enhance the core competitiveness of the integrated circuit industry of our country. So that owns the independent intellectual property rights of the complete sets of advanced technology and new material technology, and corresponding semiconductor equipment control software technology and the related industries, get rid of China's high-end integrated circuit manufacturing equipment, technology and software control, totally dependent on imports situation, to ensure national security and economic security has the vital significance.Stable and reliable software system is integrated circuit equipment is the key factor of guarantee, but our country software in semiconductor integrated circuit control development in the field long-term treatment of backward position, the domestic semiconductor companies is the purchase of foreign advanced equipment, software control system for the device comes with a product, so use in the software, software upgrades, software problem solving controlled by others, not to mention custom software development. On the other hand, domestic equipment manufacturers to develop the software in software architecture and development thought backward, single device software control, unable to form a system, development and function of the software system does not meet the standards of the semiconductor industry, in operation process are the core task scheduling and management form is not flexible and problem. Therefore, it is difficult to achieve, resulting in high cost of software system, the core technology can not grasp, no independent intellectual property rights and other issues.This topic to Beijing SevenStar Electronics Co., Ltd. integrated equipment R & D Center R & D 200 mm silicon epitaxial equipment as the background, from the technical demand analysis, analysis of industry standards, the overall design of the software, the detailed software design, software development and comprehensive test process of analysis and research, and to carry out analysis and Research on the software system of the equipment, complete system software development, formed in line with the semiconductor equipment automation control requirements and standards of the semiconductor industry for the whole control system software. Is a set of complete, have independent intellectual property rights, high performance semiconductor general software system, breaking the monopoly of foreign semiconductor industry control software, the use of high cost, core technology can not grasp, no independent intellectual property rights and semiconductor integrated circuit device software system solution.