Silicon Epitaxial Equipment Monitoring And Control System Software Design And Development

IC manufacturing is the national economy and Realization of electronic information industry one of the modern high-tech upgrade. IC manufacturing process generally need to slice, extension, deposition, lithography, ion implantation, a process completed. While the silicon epitaxial equipment as the front-end processing equipment of IC manufacturing process, the production equipment products directly affects the quality of subsequent process equipment product quality, so it has important significance for effective monitoring of silicon epitaxial process.Silicon epitaxial process is a need for a variety of gas(such as H2, HCL, SiH4) of on-off control, a complicated process and in the cooperative control of other auxiliary equipment and complete. Bad parameter processing a unit equipment in the process of not timely will likely result in silicon epitaxial process failure, benefits of the enterprise. On the other hand, in the silicon epitaxial process with inflammable, explosive, toxic and other dangerous gas doping, if leakage of dangerous gases does not control in time, may affect the safety of equipment and personnel safety, and cause economic loss.In this paper, silicon epitaxial equipment as the research object, starting from the actual demand of silicon epitaxial equipment, first introduced the composition of functional structure of silicon epitaxial equipment is studied in this paper, followed by an analysis of the functional requirements of the overall functional requirements with silicon epitaxial equipment monitoring software and concrete. According to the decomposition of silicon epitaxial equipment monitoring software, as well as from reducing the coupling between modules, improve software maintenance consideration, the establishment of the overall function of silicon epitaxial equipment monitoring software model, relational model between modules, data flow model, design the components and modules between the call relationship. Finally, considering the integrity requirements gathering of data monitoring software, the design of the data buffer queue dynamic; considered from the tissue extension device data Silicon rationality requirements, design of organization structure data silicon epitaxial equipment; considering the practical needs of silicon epitaxial device interface information display, design method for updating the observer pattern based interface, and from the point of view of software maintainability considerations, the observer pattern using optimization method based on event and delegate; from the silicon epitaxial equipment alarm processing needs into consideration, the monitoring software module in the relevant alarm processing algorithms are designed in detail. At the end of the article, the specific type of monitoring software modules in each component of the reliability function, and silicon epitaxial equipment monitoring software is verified through the software test.