An Againing And Detection System Of Mass Flow Controller(MFC) Based On LabVIEW

Mass Flow Controller(MFC) has been used for measurement and controlling of a mass flow of gas since its first appearance. The accuracy of the MFC is not affected by pressure or temperature. It has been widely used in cutting-edged areas such as semiconductor, photovoltaic, fuel battery and vacuum industry. Many emerging industries are using MFC as a gas control device due to the fast development of technology, especially the information technology. In those industries which gas mass flow measurement and controlling accuracy are strictly required, MFC even became the key part of their products. The wide usage and increasing importance of MFC requires higher reliability of it, for any failure happened to it will lead a series of problems. Therefore, it's very important that the supplier carrying out process to remove those products that have incipient faults.In this paper, a process based on LabVIEW(Laboratory Virtual Instrument Engineering Workbench) has been developed for the aging control and detection of MFC components. The reliability of MFC products was significantly increased with the help of fatigue experiments, accelerated aging process, online detection and early fault removal. Aging screening efficiency and the accuracy of the judgment will be greatly improved and the labor costs will be reduced through this equipment combined with software control method.The present domestic and abroad research situation of MFC, virtual equipment and MFC detection equipments were introduced in this paper. The working principle and failure mechanism of MFC were analyzed. The design scheme and structure model of the aging test system were determined. This research is mainly focused on the use of virtual instrument technology to realize the combination of system hardware and software. Lab VIEW platform was used for PC software development. Modular design was adopted in the software including the acquisition module, control module, display module and data processing module, which can realize the automatic data collection and analysis in multi-channels with multi-signals at the same time. Automation control and on-line detection were achieved, too. In this way a real-time monitoring, automotive, highly efficient aging system was set up. The system test results and aspects needs to be improved are given in the end of the paper.