| It uses many gases in the manufacturing process of a semiconductor Fab, most of them are toxic, highly corrosive or highly flammable; once they leaked in the Fab without warning and alarm, they might cause extreme treat to the life and safety of the personnel who working in the Fab. So Gas Detecting and Monitoring System plays a very important role in the semiconductor Fab, it can show abnormal gas leakage timely and provide warning and alarm message to the personnel for next process.The purpose of this paper is to design an optimized Gas Detecting and Monitoring System for semiconductor Fab. It can detect gas leakage and earthquake, timely shut down gas supplying and send alarm to the personnel who working in the Fab. The whole system design is based on gas characters, gas supplying loop, processing tools location to provide gas detecting function, monitoring function, alarm and interlock function. This system will be connected through Ethernet, redundant PLC control to perform gas detector data collection and signal transfer; in the mean time, the alarm design process and gas supplying shut down interlock function will be integrated and verified with its validity to meet the design requirement. |
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