Design Of Si-based Microstructure CO Gas Sensor Microsystem

In recent years, due to the gas leak and gas explosion in coal, mining andother enterprises bring a certain amount of security risks to the safe production.so, the research of A kind of gas device that can real-time and accurate detectinflammable, explosive, poisonous and harmful gas is the premise of safety inproduction, as well as the important subject that scientific research personnelhave been researched. As the core part of gas detection system, the gas sensordetermines the performance of detection system.CO is one of the key detection poisonous gas in coal mine. This paperdesigned a microstructure gas sensor micro system based on silicon substrate todetect CO. The main researches are as follows:1. A micro-structure of CO gas sensor with temperature compensationfunction has been designed. The temperature field of the designed silicon micro-structure gas sensor has been simulated and analyzed so as to optimize thestructure of the sensor, the thermal stress of the sensor in the working status hasbeen simulated and analyzed so as to verify the feasibility of the process.2. The technological process of the micro-structure CO gas sensor has beenintroduced, and the preparation of the sensor has been completed by thephotolithographic lift-off process; the sensing mechanism of the sensor has beenanalyzed, and the gas sensing materials nano-zinc oxide was synthesized byhydrothermal synthesis method. And the laser cutting, sensitive material coating,sintering, welding wire package has been completed, completing the sensorproduct preparation.3. Electrode heating circuit, gas concentration signal conditioning circuitand programmed temperature circuit has been designed for the micro-structuregas sensor, providing the basis for the follow-up testing of sensor.4. The performance of the micro-structure sensor was tested, including the temperature performance, the gas concentration performance and the sensitivityperformance, and the test results has been analyzed.The sensor has the advantages of small size, low power consumption anduniform temperature distribution, and can test the concentration range of0to1000ppm of CO gas. But the resolution and consistency still need furtherevaluation, and the process should be improved.