The Microplate Design Of The Silicon Microstructure Gas Sensor And The Organic Steam Sensitivity Study Of The Si-NPA

Here in the conductive mechanism and the heat transfer of gas sensitive film,on the basis of finite element theory,using the low thermal conductivity of porous silicon design a lower than SiO₂ thermal barrier power consumption on porous silicon as thermal barrier has a new structure of the micro hot plate gas sensor.Through the simulation analysis on the heating electrode loaded e10 heat generation rate is 1 W/m after load,the remaining the same conditions,produced by the heating plate temperature of the porous silicon as a thermal barrier is higher than SiO₂ thermal barrier of 11 ?,so when you need to reach the same temperature,the porous silicon as a thermal barrier lower power consumption.This paper is also to a regional order and size controlled room temperature gas sensor array based on silicon nanometer performance analyses,it was as organic vapor at room temperature sensor research for ethanol,acetone gas sensitive performance.And I'll do the I-V curve.The I-V curve shows that the silicon nanoparticle array gas sensors are sensitive to ethanol and acetone organic vapor.The threshold voltage is 0.5 V and the operating voltage is 3 V.In the 1% ethanol vapor,the response time was 5 s,the recovery time was 15 seconds,and the stability of the silicon nanoparticle array gas sensor was evaluated.The results of gas stability can be used for actual detection.Mainly can be attributed to these fine sensing properties,physical adsorption of gas molecules on silicon column and gas steam filled in the hole,causing silicon nanometer bore log array overall dielectric constant change.