Polysilicon Melting Funace System Based On PLC

Polysilicon melting funace studied in this paper includes vacuum control system, temperature control system and mechanical drive control system. Vacuum control system is mainly used for meeting the requirements of cacuum in internal furnace. Temperature control system is mainly used for the control of furnace temperature according to the temperature programme set in advance. Mechanical drive part is used for the precision positon of heating panel at the bottom of the furnace.The mutual coordination and cooperation of the three parts ensure that the process of polysilicon crystal growth is completed successfully.Up to now, the PLC, configuration application and the commuciation technology are very popular in the field of industrial control. Because of the high speed development of PLC, the advantages of PLC are more and more prominent, such as convenience for application, high reliability, preferable ability of anti-electromagnetic interference, high adaptability to circumstance, perfect and mature system of industrial control network, so that PLC has been widely used in industrial automatic control process. Configuration software as an open platform can be used to set up the specific functions of the man-machine interface according to their own needs. We can use the human-machine windows and PLC to control the automation devices intuitively and easily.In this system, PLC and configuration software work together to collect data of system devices and control the valves, servo motors, interediate frequency power supply instrument, etc. We use the servo motor to complete the position control of the heating panel at the bottom of the furnace. Using configuration software (KingView), the technical operation personnel can easily observe the system status such as the technological processes, the on-off state of equipment, real-time temperature, the on-off state of servo motor. At the same time, it can control valves and motors, and monitor the heating panel position.Polysilicon melting funace system based on PLC include man-machines man-machine interface, servo motor, testing, etc. This paper introduces the overall design, interface design, PLC and the upper machine communication program design, program design for reading data from outside meter, etc.