Study On The Fabrication And Characteristics Of Visible Vertical Cavity Surface Emitting Laser Arrays

Vertical Cavity Surface Emitting Lasers are widely used in optical communication, optical connection,and optical calculation. The VCSELs have many advantages such as low current, and they are especially suitable for making two-dimensional arrays.In this paper, we give some results on the design and fabrication of visible VCSELs, the main work is as follows:We simply described the theory of VCSEL. In order to solve the problem of inhomogeneous current injection, We designed a new type of electrode structure, which can lasing in a big aperture. We also improved the etching groove, and made use of ANSYS to simulate the thermal characteristics of VCSEL. The result showed that the improved etching groove was helpful to heat dissipation; We have simulated different size of the device, when the space between one device and another is600μm in VCSEL arrays. The result showed that the thermal interaction did not exist. We have deeply studied the photo etching technique, wet etching and selective oxidation technique. Finally the3×3VCSEL arrays were fabricated, and the threshold current was380mA,10.2mW output optical power for CW operation have been gained.