| The visible band vertical-cavity surface-emitting lasers with ease of integration, to achieve high-speed modulation and power consumption advantages, have broad in laser printing, light shows, and many other areas of application.Conventional VCSEL has the shortages of the poor thermal performance, uneven current injection, and so on. The new VCSEL we made in this paper improves the thermal performance of the traditional ring-electrode VCSEL, and also improves the uneven injection current characteristic of the ring-electrode VCSEL. First, we changed the ring-electrode structure of the tradition VCSEL into the "double ring cruciform" electrode structure, to make the new electrode access to the inside of the light-hole, so that improved the uniform injection current. And then, we improved the corrosion groove structure. At last, the VCSEL arrays with the new electrode structure and the new corrosion groove structure was confirmed that has better thermal dissipation, better beam quality by the simulation and test.We have designed and produced a photolithographic plate with the new double ring cruciform electrode structure and the new corrosion groove structure. And we successfully prepared the new4×4VCSEL array through a series of experiment, such as photo etching, wet etching and selective oxidation, the optical power was18.12mW, the center of the emission wavelength was670nm and the threshold current was380mA. We used ANSYS to simulate the steady-state and transient condition thermal performance of the array units’pitch of500μm and400μm VCSEL, and finally we determined when the pitch of the array units is500μm had the better cooling effect. At last, we test the array beam quality, the light intensity, volt-ampere characteristics and other optical and electrical properties. The result of the test proved the new electrode and corrosion groove structure could optimize array device cooling capacity and optimize device quality light output. |
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