Study On Surface Emitting Lasers With New Distributed Groove Structure

In this paper a new structure which vertical cavity surface emitting laser(VCSEL) with new distrubiuted groove structure was designed and explored,in experiments growth the Muti-Quantum Wells(MQW) by Molecular Beam Epitaxy(MBE). By using optimization process and design of Reactive Ion Etching (RIE),oxide confined and the ohm contact ect.The high performance with new structure that of distributed groove of VCSELs were fabricated. The testing results show that these VCSELs operate with good performance ,the new structure of VCSELs can reduce the value thermal resistance of p-type distribute Bragg reflectors(p-DBR) and against the low light output power, improve the characteristics of the light output and thermal characteristic effectively. The lowest threshold currents of the distributed groove of VCSEL is 1.8mA, the highest of the outpower is 7.96 mw, light output power is about 1.3 times as much as convetional structure.