The Design And Fabrication Of Silicon V-Groove Arrays

In this paper , an emphasis is put on the design and fabrication of V- groove arrays. The material we use is monocrystalline silicon . Silicon V- groove structure can provide fiber with high precision orientation . So the problems about how to make light into SOI efficiently and coupling between multichannel waveguide devices and fibers can be solved .The coupled mode theory of single- mode fiber and ridge waveguide has been described and analyzed , and the best coupling condition is obtained . Based on the condition , the author makes a reasonable program . In order to make integration of theory with practice , a lot of experiments have been done . Mask-making technology , photoetching and wet-etching processes have been optimized . The author also presents the application and commercial value of silicon V- groove arrays.