Research On The Design And Experiment For High-power Separate-excited Tube RF Power Supply

RF power supply plays an important role for the high power RF-excited CO₂ laser system. This thesis aims to research a RF power supply system of the high-power CO₂ lasers, the principles and working parameters of the circuit components of separate-excited RF power supply circuit has been analyzed. The simulation design of RF power supply circuit has been carried out by RF simulation software EDA. Through the load system experiment, the thesis researches characteristics of RF power supply. The main results are as follows.(1) Characteristic of self-excited tube RF power supply, separate-excited tube RF power supply and solid-state power supply have been analyzed in the thesis, and the scheme of separate-excited RF power supply as the power source of 500W RF-excited CO₂ laser has been chosen. The circuit of a RF power supply system is designed, including the scheme of RF power and technical parameters.(2) The 300W amplifier module which includes the crystal oscillator, 150mW BJT amplifier module, 10W MOS amplifier module and 300W Push-pull MOS amplifier module have been designed in the thesis. The simulation analysis of the each amplifier module has been carried out by the simulation software multisim. Further, working parameters is chosen.(3) The 8KW tube amplifier module has been designed in the thesis. Based on the static working curve of quadrupole bunch of shoot tube, FU-113F, the PSPICE model of the FU-113F is established through the use of MATLAB of numerical computation function. According to the specific requirements, 8KW amplifier module has been integrated designed and simulated in the thesis.(4) The principle of the power control and power test has been discussed in the thesis. Through the load system experiments which include the dummy load experiment and the laser load experiment, the power output characteristics are systematically researched.By making detailed theoretical analysis and experimental research of separate-excited separate-excited RF power supply, the thesis hopes to make the contribution to the RF-excited CO₂ laser development.