Research Of Power Supply For RF Excited CO₂ Laser

The RF excited CO₂ laser is widely applied for its excellent capability in the area of the low power laser process. This thesis mainly focus on the RF excited CO₂ laser power system in the low power, especially on the RF power research, then introduces the relatively specific basic knowledge of the RF circuit analyzing and designing, and analyses the overall laser power system. The load of RF excited CO₂ laser power is the discharging gas, and the transport of the RF is in fact a process of wave, as a result that the identity of the load will affect the input of the RF laser power. This thesis analyses the principles of discharging and the factors of the power in the CO₂ laser, specifically calculates the model of CO₂ laser discharging principle, carefully studies the ingredient of the gas in CO₂ laser and at last deduces theoretically the plus, efficiency and power of the gas discharging. Based on the analysis and study, the RF excited CO₂ laser of discharging gas equivalent circuit can be designed and provide the essential condition of the RF power. Because of the great effect of the stray capacitance and stray inductance under the high frequency, both the analysis methods and design applications of the high frequency show different from the one of low frequency circuit. In order to explain theoretically and prepare for the requirements of the technology updating, this thesis take a deep research into the RF identity of the components, the knowledge of the RF net, and the stray parameters in the RF and MW circuit analysis and design. On the basis of this research, the 50MHz¹00MHz adjustable signal source and 100W amplifier, in which the adjustable power can produce 50MHz, 100W signal can be designed, and it can be directly applied on 100W RF excited CO₂ laser, which achieved the expecting index in the experiment. The whole design does not only consider compatible ability of the power with other equipment but also go deep into the RF core technology, for example , the impedance match. Meanwhile, this thesis discusses the problems in analyzing, designing and adjusting.