| As the power source of lasers, RF power plays an important role in the laser system. Based on the study of oscillation and amplifier circuit, impedance matching, power controlling and other key technologies, this thesis aims to develop a RF power system of the high-power CO2 lasers, focusing on the research of theories and design of process. The main achievements are as follows.(1) According to the technical requirements of lasers, the system structures of RF power are designed, and the scheme of self-excited RF power has been chosen.(2) The circuit of a RF power system is designed, and the working principle of oscillation and amplifier circuit, impedance matching and power controlling are mainly analyzed. In the part of oscillation and amplifier circuit, working parameters of the circuit components and RF tube are calculated in details. In the part of impedance matching, in order to get the maximum power output, the approach of conjugation matching is decided, and the general method of impedance matching is provided as well. In the part of power controlling, the way of Pulse Width Modulation (PWM) has been used so that the pulse frequency and laser power can be controlled on line in CW mode or pulse mode.(3) The general principles and methods including component selection, layout, routing and welding are present. At the same time, some measures are taken to improve the heat dissipation and reduce the adverse influence of noise and interference.In this thesis, by means of investigating high-power RF generator, the theory analysis and technology design have been completed. It is useful for the development of a high-power RF laser. |
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