Research Of Power Supply For RF Excited CO₂ Laser

The RF excited CO₂ laser is widely applied for its excellent performance in the area of the low power laser process. At first , the history and actuality of RF-excited CO₂ laser and application of RF excited CO₂ laser in the processwere are presented. Then,this thesis mainly focuses on the RF excited CO₂ laser power system in the low power , especially on the RF power research, and introduces the relatively specific basic knowledge of analysis and design of the RF circuit , and analyzes the overall laser power system.The load of RF excited CO₂ laser power is the discharged gas, and the transport of the RF is actually the movement of wave ,as a result the identity of the load will affect the input of the RF laser power.This thesis analyses carefully the discharge principle in CO₂ laser. Base on the analysis and study , the RF excited CO₂ laser of discharging gas equivalent circuit can be designed and provide the essential condition of the RF power.Because of the great influence of the stray capacitance and stray inductance on the circuit at the high frequency,both the analysis method and application design of the high frequency are quite different from the one of low frequency circuit.In order to explain theorie and prepare for the technology updating, a deep research into the RF circuit has been done. On the basis of this research, the signal source of 50MHz, 100W has been designed.,and it can be directly applied on 100W RF excited CO₂ laser, which achieved the expecting index in the experiment. The whole power design not only analysis the principle of each part of circuit, but also go deep into the RF core technology , for example the impedance match.At last , this thesis introduces the principle and debug of 300W RF power amplifer. In power amplifer design, the transformer installment has made the detailed introduce. Meanwhile ,this thesis discusses the problems in analyzing , designing and adjusting.